2012 Volume 21 Issue 7
Article Contents

Gao Fei, Li Xue-Chun, Zhao Shu-Xia, Wang You-Nian. 2012: Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition, Chinese Physics B, 21(7): 385-390. doi: 10.1088/1674-1056/21/7/075203
Citation: Gao Fei, Li Xue-Chun, Zhao Shu-Xia, Wang You-Nian. 2012: Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition, Chinese Physics B, 21(7): 385-390. doi: 10.1088/1674-1056/21/7/075203

Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition

  • Available Online: 30/12/2012
  • Fund Project: the National Natural Science Foundation of China(Grant .11075029 and 11175034)%the Specialized Research Fund for the Doctoral Program of Higher Education of China(Grant 20090041110026)%the Fundamental Research Funds for Central Universities of China(Grant DUT11ZD109)
通讯作者: 陈斌, bchen63@163.com
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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